| 摘要 |
A small, light weight drive apparatus is capable of driving an object in a predetermined direction, as well as being capable of micromotion in a rotation direction and in an orthogonal direction to the predetermined direction. A drive apparatus drives an object within a two dimensional plane including a first axis and a second axis orthogonal to the first axis. The drive apparatus includes a first stage on which the object is placed. A micromotion mechanism slightly drives the first stage in a direction of the second axis and in a rotation direction about a third axis orthogonal to the two-dimensional plane. A second stage holds the first stage without physically contacting the first stage. A non-contact holding mechanism disposed between the first stage and the second stage holds the first stage to the second stage in a non-contact manner allowing for micromotion of the first stage in the second axis direction and in the rotation direction relative to the second stage. A macromotion mechanism drives the second stage in a direction of the first axis. The second stage, the non-contact holding mechanism, the micromotion mechanism, and the macromotion mechanism all are disposed on one side of the first stage relative to the third axis. Because of this, it is possible to adjust the position of the object placed on the stage with high precision in the second-axis and rotation directions. In addition, since the second stage, the non-contact holding mechanism, the micromotion mechanism and the macromotion mechanism are all disposed on one side of the first stage, it is possible to make the apparatus smaller and lighter in weight.
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