| 摘要 |
PROBLEM TO BE SOLVED: To remove dust and minute particles stuck to the surface of a substrate or a sheet being the subject to be cleaned without touching the surface. SOLUTION: Dust and minute particles 5 stuck to the surface of the substrate or the sheet 2 electrified positively or negatively are attracted by the static electricity generated at a static electricity generator 7 consisting of an adhesive rubber roll 8 and an adhesive tape roll 9. Electrically neutral dust and minute particles are physically peeled off from the surface by the air blown from an air sending unit 10 and stuck to the rolls 8, 9 or sucked by a sucking unit 11. Thus, the dust and minute particles stuck to the surface of the substrate or the sheet can rapidly and surely be removed with ease.
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