DEVICE AND METHOD FOR MEASURING QUANTITY OF UV-RAY AND CONTROL APPARATUS FOR UV LIGHT SOURCE

摘要

PROBLEM TO BE SOLVED: To provide inexpensive device and method for measuring the quantity of UV-rays stably for a long time and a control apparatus for UV light source using that device and method which can be used even under a high temperature state. SOLUTION: The device for measuring the quantity of UV-rays being used for measuring the quantity of light of a UV light source comprises a semiconductor light receiving element comprising a semiconductor layer 24 containing at least 0.5-50 atm.% of hydrogen, at least one group IIIA element and nitrogen, and an electrode 25 formed on the surface of a conductive substrate 23. The controller for UV light source comprises the device for measuring the quantity of UV-rays.