| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film magnetic head with which the magnetic pole width can be greatly miniaturized highly accurately, its manufacturing method, and a magnetic layer pattern forming method with which a thin and long magnetic layer pattern can be formed highly accurately. SOLUTION: A precursory magnetic layer is formed so that the magnetic layer has a large width (>W2) and an end edge extending in the width direction of a rear end part is linear, and the precursory magnetic layer is selectively etched by RIE by using an upper magnetic layer 12C (first magnetic pole tip part 12C (1)) formed on the precursory magnetic layer as a mask. By using this method, a second magnetic pole tip part 12A is formed so that the tip part 12A has a very small constant width (e.g. 0.1μm) and an end edge extending in the width direction of a rear end surface 12AM is linear.
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