SUBSTRATE-PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To provide a substrate-processing apparatus which can lower the running cost of the device by effectively removing contaminant substances in the surrounding. SOLUTION: A processing device body 10 is connected to an adsorptive removing device 20 via a cleaned air flow passage 13. The adsorptive removing device 20 is equipped with an adsorption member, which adsorbs chemical contaminant substances in the outside air and is recycled by processing such as heating. Cleaning processing using part of the adsorption member and the recycling processing of other parts by the adsorption member are carried out in parallel. Cleaned air obtained by the adsorptive removing device 20 is supplied to a substrate-processing part 11 via a dust removing filter 12. The adsorption member is recycled and used, so that the running cost of the device is can be reduced.