| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical disk master disk exposing device capable of highly precisely feeding a slider. SOLUTION: The device is provided with a first display means for displaying the feeding deviation signal of the slider, a first measuring means for measuring the vibration amount of a base in the direction perpendicular to a feeding direction, a second display means for displaying the output signal of the first measuring means, second and third measuring means for measuring the vibration amount in the feeding direction of a rotating part in a rotary mechanism and in the direction perpendicular thereto, a first control means for transmitting a signal in a direction to cancel a rotary vibration transmitting force received by the base based on the frequency and phase information of output signals which are outputted from the second and third measuring means, and first and second excitors to be freely excited in the feeding direction and in the direction perpendicular to the transmitting direction by the transmitting signal of the first control means.
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