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发明名称
Positiv arbeitende Resistzusammensetzung
摘要
申请公布号
DE69710547(D1)
申请公布日期
2002.03.28
申请号
DE1997610547
申请日期
1997.10.15
申请人
SUMITOMO CHEMICAL CO., LTD.
发明人
FUKUI, NOBUHITO;YAKO, YUKO;TAKAGAKI, HIROSHI;TAKAHASHI, KENJI
分类号
G03F7/004;(IPC1-7):G03F7/004;G03F7/039
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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