| 发明名称 |
Method of and apparatus for substrate pre-treatment |
| 摘要 |
The present invention relates generally to a method and apparatus for converting a precursor material, preferably organometallic, to a film, preferably metal-containing, that is adherent to at least a portion of a substrate. Both method and apparatus include a pre-conversion step or section, and a step or section for substantial conversion of a portion of material from the pre-conversion step or section into the form of a predetermined pattern, wherein this substantial conversion results in a metal-containing patterned layer on the substrate.
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| 申请公布号 |
US2002037481(A1) |
申请公布日期 |
2002.03.28 |
| 申请号 |
US20010874330 |
申请日期 |
2001.06.06 |
| 申请人 |
LEE WAI M.;MALONEY DAVID J.;ROMAN PAUL J.;FURY MICHAEL A.;HILL ROSS H.;HENDERSON CLIFFORD;BARSTOW SEAN |
发明人 |
LEE WAI M.;MALONEY DAVID J.;ROMAN PAUL J.;FURY MICHAEL A.;HILL ROSS H.;HENDERSON CLIFFORD;BARSTOW SEAN |
| 分类号 |
B05D3/06;B05D7/24;H01L21/027;H01L21/033;H01L21/288;H01L21/3065;H01L21/308;H01L21/311;H01L21/314;H01L21/316;H01L21/3205;H01L21/768;H05K3/10;(IPC1-7):B05D3/00;B05D5/00;G03C5/04;C08J7/18;G21H1/00 |
主分类号 |
B05D3/06 |
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