| 摘要 |
<p>A multi-axis magnetically actuated device, an array and a method of fabrication thereof are disclosed. In addition, disclosed is an optical switch comprised of an array of multi-axis magnetically actuated devices and an array of ports adapted to receive an optical waveguide. The multi-axis magnetically actuated device is capable of rotational movement in two orthogonal directions. The multi-axis magnetically actuated device comprises two nested rotational members, an inner rotational member nested within the outer rotational member that in turn is nested within a base member. The inner rotational member is mounted by two inner torsional flexures to the outer rotational member that in turn is mounted by two outer torsional flexures to the base member. The rotational motions of each rotational member arise in response to an interaction between a magnetic influence and a magnetic moment generated by a current passing through coils arranged adjacent to a surface of the inner rotational member. The inner rotational member may function as a reflector.</p> |
