METHOD FOR DEPOSITNG HARD CARBON FILM ON METAL BASE MATERIAL

摘要

PROBLEM TO BE SOLVED: To improve adhesion between a metal base material 30 and a hard carbon film (DLC) 33 and also to improve the effect of the hard carbon film as a protective film by hardening the base material. SOLUTION: By adding gaseous nitrogen to inert gas at bombardment, nitriding treatment is carried out simultaneously with bombardment to harden the metal base material 30. Further, as to an intermediate layer 31, a nitride- formable metal is used and the metal base material 30 and the intermediate layer 31 are bound together via nitrogen to improve adhesion. A gradient structure 32 can be formed between the intermediate layer 31 and the hard carbon film (DLC) 33.