METHOD FOR PRODUCING THIN FILM OF OXIDE FLUORESCENT SUBSTANCE FOR ELECTROLUMINESCENT ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method for producing a thin film of an oxide fluorescent substance for an electroluminescent element, capable of producing the electroluminescent element of the thin film of the oxide fluorescent substance more simply in a shorter time than conventional methods. SOLUTION: In producing the thin film of the oxide fluorescent substance for the electroluminescent element by sputtering, the film is formed while carrying out a rapid thermal anneal treatment.