METHOD AND APPARATUS FOR EPITAXIALLY GROWING A MATERIAL ON A SUBSTRATE,申请号EP20000927574-传众专利搜索

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发明名称	METHOD AND APPARATUS FOR EPITAXIALLY GROWING A MATERIAL ON A SUBSTRATE
摘要
申请公布号	EP1190122(A1)	申请公布日期	2002.03.27
申请号	EP20000927574	申请日期	2000.05.12
申请人	EMF IRELAND LIMITED	发明人	ROBINSON, MICHAEL FRANKS
分类号	C30B29/38;C23C16/44;C30B25/02;C30B25/14;H01L21/205;(IPC1-7):C30B25/14	主分类号	C30B29/38
代理机构		代理人
主权项
地址

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