发明名称 |
METHOD FOR SUPPRESSING ADHERENCE OF MICROPARTICLE TO ARTICLE SURFACE |
摘要 |
PROBLEM TO BE SOLVED: To provide a method for reducing the adherence of microparticles to the surface of articles placed in an atmosphere where the microparticles are suspended. SOLUTION: This method comprises the following practice: the velocities v and v2 of an airflow and/or the moving velocities v1 and v3 of respective articles 12 and 14 are regulated so that the relative airflow velocity on the respective surfaces of the articles 10, 12 and 14 placed in an atmosphere where microparticles are suspended comes to 1.5-2.5 m/s.
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申请公布号 |
JP2002085033(A) |
申请公布日期 |
2002.03.26 |
申请号 |
JP20000277181 |
申请日期 |
2000.09.12 |
申请人 |
HITACHI PLANT ENG & CONSTR CO LTD |
发明人 |
ONAKA TAKAMASA |
分类号 |
F24F7/06;A23L3/3418;H01L21/02;(IPC1-7):A23L3/341 |
主分类号 |
F24F7/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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