发明名称 |
Scanning electron microscope/energy dispersive spectroscopy sample preparation method and sample produced thereby |
摘要 |
A method of preparing a monolithic structure for scanning electron microscope/energy dispersive spectroscopy (SEM/EDS) and a sample produced by way of the method. In one embodiment, the method includes: (1) aiming a focused ion beam at a location behind or beneath an area of interest in the monolithic structure and (2) employing the focused ion beam to remove at least a portion of an interaction volume of material beneath the area of interest. The area of interest preferably remains substantially intact for the spectroscopy.
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申请公布号 |
US6362475(B1) |
申请公布日期 |
2002.03.26 |
申请号 |
US19990337966 |
申请日期 |
1999.06.22 |
申请人 |
AGERE SYSTEMS GUARDIAN CORP. |
发明人 |
BINDELL JEFFREY B.;STEVIE FREDERICK A.;VARTULI CATHERINE |
分类号 |
G01N1/32;(IPC1-7):G01N1/28;H01J37/20 |
主分类号 |
G01N1/32 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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