发明名称 Method for manufacturing fringe field switching mode liquid crystal display
摘要 This invention provides a method for manufacturing a fringe field switching mode liquid crystal display. The method includes the steps of: depositing a transparent metal layer on a transparent insulating layer and forming a counter electrode by etching the transparent metal layer according to a first mask process; depositing an insulating layer on the counter electrode and the substrate; depositing a first opaque metal layer on the insulating layer and forming a gate line, a common electrode line and a pad by etching the first opaque metal layer according to a second mask process; depositing a gate insulating layer, an a-Si layer and an n+ a-Si layer in turn on a resultant and defining an active region of thin film transistor by etching the n+ a-Si layer and the a-Si layer according to a third mask process; depositing a transparent metal layer on the resultant and forming a pixel electrode of a comb shape by etching the transparent metal layer according to a fourth mask process; etching the gate insulating layer according to a fifth mask process so that the pad is exposed; forming a source electrode, a drain electrode and data line including a data pad by etching the second opaque metal layer according to a sixth mask process; and forming a passivation layer on the entire resultant and etching the passivation layer according to a seventh mask process so that the data pad is exposed.
申请公布号 US6362032(B1) 申请公布日期 2002.03.26
申请号 US20000559367 申请日期 2000.04.24
申请人 发明人
分类号 G02F1/1333;G02F1/1343;G02F1/136;G02F1/1362;G02F1/1368;G09F9/00;G09F9/30;H01L21/336;H01L21/77;H01L21/84;H01L27/13;(IPC1-7):H01L21/00 主分类号 G02F1/1333
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