| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic field sensor whose sensitivity is high in the high-frequency region, indluding GHz band. SOLUTION: The magnetic field sensor is a magnetic field sensor, which is composed of a thin-film magnetic impedance effect element using a magnetic thin film from among magnetic impedance elements as magnetic field sensors, using a magnetic impedance effect. Especially regarding the size shape of the element for the magnetic field sensor, when a current frequency to be energized is 1 GHz or higher, the size (width) of a magnetism-sensitive part magnetic material in a direction nearly perpendicular to a magnetic field sensing direction is formed be small (e.g. 1μm) and slender with reference to a magnetic field, in such a way that the change in an impedance reflecting a change in the magnetization of the magnetism-sensitive part magnetic material (a soft magnetic material or the like) is generated or that the most noticeable magnetic field of the magnetic resonance of the magnetism-sensitive part magnetic material is lowered. Thereby, the high sensitivity of a magnetism-sensitive part can be realized, as compared with the conventional element (width of 100μm), as shown in the graph.
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