| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a method and a device for recovering rear gas in gas exhausted out of a vacuum chamber for a long period of time. SOLUTION: A part of gas containing rear gas in a gas discharged out of a vacuum pump 1 is condensed once in a cryopump 5 by controlling a pressure in the same. Then, the condensed gas is re-vaporized and is passed through a gas purifier 6 equipped with a getter member absorbing a gas except the rear gas to reserve the passed rear gas into a rear gas storage vessel 7. The cryopump 5 having a plurality of cooling surfaces with different temperatures, the gas purifier 6 employing the getter member not collecting the rear gas, and the rear gas storage vessel 7, are connected to the vacuum chamber, while a turbo molecular drag pump 26 which controls the internal pressure of the same, and a roughing vacuum pump 27, are connected sequentially to the cryopump. The cryopump 5 can be connected to the fore side of the turbo molecular drag pump 9 connected to the vacuum chamber.</p> |
