摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic bearing device which is independent from any variance of a gap between a rotating body as supported body and a position sensor, and excellent in controllability. SOLUTION: This magnetic bearing device comprises an electric magnet 5 for supporting a rotor in a non-contact manner, an excitation amplifier 31 for feeding the exciting current to the electromagnet 5, a displacement sensor 7 for detecting the position of the rotor 4, and a control means 30 for outputting the control signal on the exciting current based on the sensor signal of the position sensor 7. The predetermined AC signal, for example, the sinusoidal signal is added to the control signal input in the excitation amplifier 31, the transfer function gain of an object A to be controlled including the position sensor 7 is calculated based on the sensor signal, and the sensor signal is corrected by the ratio of the transfer function gain to the predetermined reference gain. The magnetic levitation of the rotor 4 is controlled based on the corrected sensor signal.
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