SCANNING ELECTRON MICROSCOPE

摘要

PROBLEM TO BE SOLVED: To provide a TTL-mode scanning electron microscope capable of giving high resolution to a secondary electron image and effectively providing a reflected electron image with good contrast. SOLUTION: In order not to impair the yield of reflected electrons, the angle of rotation of the reflected electrons by a magnetic field of an objective lens is considered in terms of the energy of reflected electrons, thereby disposing a detector in such a position that the reflected electrons can be captured in as wide an energy range as possible.