发明名称 |
Method of manufacturing a spin valve structure |
摘要 |
The invention relates to a method of manufacturing a spin valve structure (1) of the GMR-type. Such a structure includes a stack of a magnetic layer (11a 11b), a nonmagnetic layer (15) and a sense layer (17) of a ferromagnetic material. In order to obtain a spin valve structure having a very good GMR effect the method comprises the following specific steps: oxidation of the ferromagnetic material of the sense layer; deposition of aluminium on the oxidized ferromagnetic material; oxidation of the deposited aluminium using oxygen from the oxidized ferromagnetic material.
|
申请公布号 |
US2002034661(A1) |
申请公布日期 |
2002.03.21 |
申请号 |
US20010878980 |
申请日期 |
2001.06.12 |
申请人 |
KONINKLIJKE PHILIPS ELECTRONICS N.V. |
发明人 |
GILLIES MURRAY FULTON;KUIPER ANTONIUS EMILIUS THEODORUS |
分类号 |
G01R33/09;G11B5/39;G11C11/16;H01F10/32;H01F41/30;H01L21/8246;H01L27/105;H01L27/22;H01L43/08;H01L43/12;(IPC1-7):G11B5/39;G11B5/127 |
主分类号 |
G01R33/09 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|