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发明名称
Vertical semiconductor device with a source-down-design and corresponding fabrication process
摘要
申请公布号
EP1122796(A3)
申请公布日期
2002.03.20
申请号
EP20010102123
申请日期
2001.01.31
申请人
INFINEON TECHNOLOGIES AG
发明人
HIRLER, FRANZ
分类号
H01L21/336;H01L29/423;H01L29/78;(IPC1-7):H01L29/78
主分类号
H01L21/336
代理机构
代理人
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