METHOD AND APPARATUS FOR REMOVING SCRAP OF MULTI-LAYERED SUBSTRATE

摘要

PURPOSE: A method and an apparatus for removing a scrap of a multi-layered substrate are provided to process an edge portion of a substrate to a circular shape by removing a scrap part generated from the edge portion of the substrate and performing a surface process of the substrate. CONSTITUTION: A substrate is loaded into the inside of a loader by performing a substrate loading process. A scrap part generated from an edge portion of the substrate is removed by performing a scrap removal process. An angle of the substrate is changed and fixed by performing a substrate angle fixing process. The substrate angle fixing process is performed to execute a trimming process and a cornering process on a predetermined region of the substrate from which the scrap is removed. An edge portion of the substrate is processed. The substrate is transferred to an unloader.