| 摘要 |
PROBLEM TO BE SOLVED: To realize high impedance and low-voltage drive, when a switch is off. SOLUTION: An upper electrode 4, a lower electrode 6, a contact electrode 7 and a signal wire 8 are disposed, in such a manner that a shortest distance between the contact electrode 7 and the signal wire 8 in a switch-off state is made longer than the shortest distance between the electrodes 4 and 6.
|
