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发明名称
Verfahren zur Herstellung eines Halbleiterbauelements mit einem Kondensator
摘要
申请公布号
DE10010284(C2)
申请公布日期
2002.03.14
申请号
DE20001010284
申请日期
2000.02.25
申请人
INFINEON TECHNOLOGIES AG
发明人
HOEPFNER, JOACHIM
分类号
H01L21/02;H01L21/768;H01L21/8242;H01L27/115;(IPC1-7):H01L21/824
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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