A CODE READING DEVICE AND METHOD WITH LIGHT PASSING THROUGH THE CODE TWICE, AN EXPOSURE APPARATUS AND A DEVICE MANUFACTURING METHOD USING THE CODE READING

摘要

A code reading device includes an illuminator which illuminates a code formed on a substrate with light, a reflector which reflects the light to allow the light to pass through the code at least two times, and a detector which detects the reflected light to read the code on the substrate. The substrate is one of a photomask, a reticle, a wafer and a glass plate.