METHOD FOR TREATING SURFACE OF THREE-DIMENSIONAL POLYMER MATERIAL

摘要

PURPOSE: A surface reforming method and apparatus thereof are provided which use technology of plasma ion implantation so as to improve characteristics and electrical conductivity of the surface of three-dimensional polymer material and products thereof. CONSTITUTION: The method for treating the surface of three-dimensional polymer material by plasma ion implantation using a grid comprises the steps of placing a three-dimensional polymer material on a sample stand inside a vacuum vessel; placing a grid at a position which is spaced apart from the surface of the material inside the vacuum vessel in a certain distance; forming gas plasma ions so as to form a graphite layer lowering a resistivity on the surface of the material inside the vacuum vessel; and impressing a negative voltage pulse to the grid, thereby implanting the gas plasma ions onto the surface of the material. The apparatus for treating the surface of three-dimensional polymer material comprises a vacuum vessel(1) and a vacuum pump(2) grounded to an electricity grounding(15); a gas introduction unit(13) for introducing a gas to be used into the vacuum vessel(1); an antenna(6) and a power supply unit(4,5) for generating plasma(7) using the introduced gas; a sample stand(9) for supporting a polymer sample; a metal grid(10) to which a negative voltage pulse is impressed for implanting ions by accelerating ions from the plasma; a high voltage pulse generator(11) for generating a high voltage pulse required; and other measuring devices(12).