| 发明名称 |
System and method for creating and navigating a linear hypermedia resource program |
| 摘要 |
An integrated pad and belt for polishing a surface comprising a belt integrated with a polishing pad that forms a seamless polishing surface.
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| 申请公布号 |
US2002031988(A1) |
申请公布日期 |
2002.03.14 |
| 申请号 |
US20010957433 |
申请日期 |
2001.09.20 |
| 申请人 |
LAM RESEARCH CORPORATION |
发明人 |
PANT ANIL K.;JAIRATH RAHUL;MISHRA KAMAL;CHADDA SAKET;KRUSELL WILBUR C. |
| 分类号 |
B24B21/04;B24B37/04;B24D11/00;B24D11/06;H01L21/304;(IPC1-7):B24B1/00 |
主分类号 |
B24B21/04 |
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