| 摘要 |
PURPOSE: An apparatus for measuring a pitch of an optical waveguide array in an optical device is provided to minimize a measuring error by automating a pitch measurement device. CONSTITUTION: A light source(20) is used for outputting light to an optical waveguide array. An x-y-z moving stage(30,35,40) is used for displacing the optical waveguide array toward a z-axis direction as a light progressing direction, an x-axis direction as an aligning direction of the optical waveguide array, or a y-axis direction vertical to the x-axis direction and the z-axis direction. A vision unit(60) is formed with an imaging lens system(62) for generating an image of the optical waveguide array and an image sensor(64) for detecting the image of the optical waveguide array. A control portion(70) is used for producing a pitch of the optical waveguide array by using image information and a magnifying power of the image.
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