A composition and slurry useful for metal CMP,申请号EP19970309476-传众专利搜索

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发明名称	A composition and slurry useful for metal CMP
摘要
申请公布号	EP0844290(B1)	申请公布日期	2002.03.13
申请号	EP19970309476	申请日期	1997.11.25
申请人	CABOT MICROELECTRONICS CORPORATION	发明人	GRUMBINE, STEVEN K.;STREINZ, CHRISTOPHER C.;MUELLER, BRIAN L.
分类号	B24B37/00;C09G1/02;C09K3/14;C09K13/04;C09K13/06;C23F3/00;H01L21/304;H01L21/321;(IPC1-7):C09G1/02	主分类号	B24B37/00
代理机构		代理人
主权项
地址

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