METHOD FOR ALIGNING THREE-DIMENSIONAL MICRO STRUCTURE EMPLOYING GUIDE

摘要

PURPOSE: A method for aligning a three-dimensional micro structure is provided to align and combine a three-dimensional micro structure without damage on a three-dimensional pattern by using a guide and to remove the necessity of expensive equipment. CONSTITUTION: An upper and a lower three-dimensional micro structures(10,12) having different patterns(10a,12a) are aligned. Array guides(18) are combined to the four areas of the upper structure. The upper structure and the lower structure are aligned by three-dimensionally lifting down the array guide through an aligning portion(16) formed between an align guide consisting of wall bodies(14a,14b) corresponding to the array guides. Herein, the size of the guide is large enough to be detected by the eyes of a worker. Therefore, the structures are aligned with a low magnification microscope.