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发明名称
PROCESS CHAMBER ASSEMBLY WITH REFLECTIVE HOT PLATE
摘要
申请公布号
EP1186007(A2)
申请公布日期
2002.03.13
申请号
EP20000941486
申请日期
2000.06.16
申请人
SILICON VALLEY GROUP, INC.
发明人
LEE, JAE, YUN;CHASE, LOVELL, C.
分类号
H01L21/027;H01L21/00;(IPC1-7):H01L21/00
主分类号
H01L21/027
代理机构
代理人
主权项
地址
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