发明名称 Heating element for heating crucibles and arrangement of heating elements
摘要 There is provided a heating element and an arrangement of heating elements, respectively, for heating crucibles, in particular for LEC devices for growing semiconductor single crystals, with a tulip-shaped bottom heater (20) being built such that the heater legs of the main heater (40) positioned thereabove can barely be guided towards the bottom. Such arrangement of bottom and main heater enables multi-heater arrangements without having to interfere with a lateral insulation (18) which, thus, need not be cut out or pierced.
申请公布号 US6355910(B1) 申请公布日期 2002.03.12
申请号 US20000733835 申请日期 2000.12.08
申请人 FREIBERGER COMPOUND MATERIALS GMBH 发明人 SEIDL ALBRECHT;EICHLER STEFAN;KOEHLER ANDREAS
分类号 C30B15/14;H05B3/62;(IPC1-7):H05B3/10;C30B35/00 主分类号 C30B15/14
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