| 摘要 |
PROBLEM TO BE SOLVED: To reduce errors of a sensor output by minimizing a difference in the parasitic capacitance generated between fixed electrodes in one pair in a semiconductor dynamic quantity sensor, which enables detection of a dynamic quantity generated in directions based on a change in the capacitance between a mobile electrode and pairs of fixed electrodes, by forming the mobile electrode displaceable in X and Y directions on a semiconductor board and the pairs of fixed electrodes respectively facing each other with a detection interval between the pairs thereof and the mobile electrode in the directions. SOLUTION: Leaders 41, 51, 61 and 71 electrically connected to respective fixed electrodes separately and pads 42, 52, 62 and 72 for external connection electrically connected to the leaders are formed on the outer circumference parts of the individual first and second fixed electrodes 30 and 40 and 50 and 60, as viewed from the mobile electrode 30 out of a semiconductor substrate 12. The lengths of the leaders at the respective fixed electrodes can be made equal to each other as much as possible. |
