Optical module, transmitter, receiver, optical switch, optical communication unit, add-and-drop multiplexing unit, and method for manufacturing the optical module

摘要

A method is supported for aligning the height of a polymer waveguide to the height of a core layer of a semiconductor element in an optical module composed so as to mount the semiconductor element on its polymer waveguide substrate. In order to achieve the method, at first a waveguide is formed on the silicon substrate coated with an oxide film using a polymer whose refractive index is larger than that of the oxide film. The waveguide consists of a lower cladding layer, a core layer, and an upper cladding layer. The lower cladding layer is formed to be thinner than the conventional one and the height of the core layer is set to 5 to 10 mum. In this way, it is possible to fabricate an optical module in less process steps and at a lower cost than the conventional one.