| 摘要 |
PROBLEM TO BE SOLVED: To provide a probe card which enables measuring of electric performance of a semiconductor device having a number of electrodes arranged at a higher density by a fast signal and is made highly practicable with a sufficient stroke and a scrubbing function, and a production method thereof which enables production of the probe card with a higher machining accuracy without reguiring a microscopic assemling work. SOLUTION: The probe card is constituted of a base material 1, a wiring part 2 and an extended wiring part 3. The wiring part 2 is formed in a shape of a cantilever beam. The wiring part 2 is provided with a fixing part 11 for fixing it on a substrate 6, an intermediate part 10a erected from the fixing part 11, a protruded support 10 for supporting a probe 9 following the intermediate part 10a and the probe 9 which is brought into contact with an electrode of a semiconductor device to be measured, thereby allowing the probe 9 to have a sufficient stroke and a scrubbing mechanism.
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