| 摘要 |
PROBLEM TO BE SOLVED: To provide an interferometer for immersion microscope objective capable of quantitatively and accurately evaluating the immersion microscope objective. SOLUTION: A hemispherical plane and convex lens 12 having a plane 12 and a return spherical surface 12b is arranged facing the objective 10. In this case, an immersion liquid 15 is filled in the gap between the plane 12a and the objective lens 10, focus positions of the plane 12a and the objective 10 coincide and the center of the sphere of the return spherical surface 12b and the focus position also coincide in the arrangement. Detected wave 8 formed with a reference plane plate 4 after passing through the objective 10 is reflected vertically by the return spherical surface 12b to proceed in the reverse direction in the light path. The detected wave 8 having proceeded in the light path interferes with a reference wave 7 and its interference fringe is photographed with a CCD imaging device 6. From the interference pattern state, the performance of the objective 10 can be evaluated.
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