| 摘要 |
PROBLEM TO BE SOLVED: To provide a distortion-detecting system of a simple and inexpensive structure, capable of correcting changes in the characteristics of capacitance due to temperature. SOLUTION: The distortion detecting system comprises a capacitance-variable- system reference distortion sensor, provided with a substrate 32 which will not be substantially distorted, even if applicable maximum stress is applied to a substrate 31 for detecting distortion, a deformation surface 19 corresponding to a reference dielectric layer formed on the surface of the substrate 32 and is made to a dielectric material of which the dielectric constant is changed by distortion, and a reference interdigital-electrode capacitor 17 formed on the deformation surface 19. On the basis of the output difference between a distortion sensor provided with a variable capacitance-distortion sensor 16 for detecting the distortion formed on a deformation surface 18 and the reference distortion sensor, temperature correction is performed on the output of the distortion sensor.
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