| 摘要 |
PROBLEM TO BE SOLVED: To provide a magnetic carrying device for high-speed continuous carriage by smoothly delivering carriers between chambers in a semiconductor producing device with the plurality of chambers. SOLUTION: The magnetic carrying device are attached to three chambers 2A-2C connected to one another via gate valves 11 in an isolation possible manner for carrying the carriers 13 in the chambers. Crossway portions are formed between the chambers in a carrying passage. Driving shafts 32A-32C, a power transmission part 42 and driving devices 41A-41C are provided corresponding to the chambers for moving the carriers. Each driving shaft has a spiral magnetic joint 33 consisting of a N-pole spiral portion 33a and a S-pole spiral portion 33b. An arrangement space (d) between the driving shafts provided in the chambers is set to be a natural number multiple twice a space (p) between the N-pole spiral portion and the S-pole spiral portion of the spiral magnetic joint. This relationship permits a dislocation of +/-1.5 mm. A control device 100 is provided for controlling the operation of the driving devices of the chambers in synchronization. |
