发明名称 METAL-MASK STRUCTURAL BODY AND ITS PRODUCTION METHOD
摘要 PROBLEM TO BE SOLVED: To provide a mask structural body capable of greatly diminishing a gap between the mask and a substrate by welded burr 13, and preventing the run of a vapor-depositing pattern, when a welding part contact inside the substrate to be vapor-deposited in welding a metal mask to a frame. SOLUTION: This metal-mask structural body, wherein a thin metal mask 12 for vapor deposition is welded to a support frame 11 and this welded part is positioned at least in the substrate to be vapor-deposited, is characterized in that a concave part 12a is formed on the metal mask that is the reverse face to a frame contacting face of the metal mask, and the metal mask and the support frame are welded in the concave part.
申请公布号 JP2002069619(A) 申请公布日期 2002.03.08
申请号 JP20000255781 申请日期 2000.08.25
申请人 NEC CORP 发明人 KITATSUME EIICHI
分类号 H05B33/10;B32B3/10;B32B15/04;C23C14/04;C23C14/12;C23C14/24;H01L21/285;H01L51/50;H01L51/56;H05B33/12;(IPC1-7):C23C14/24;H05B33/14 主分类号 H05B33/10
代理机构 代理人
主权项
地址