CERAMIC HEATER FOR SEMICONDUCTOR MANUFACTURING AND INSPECTING EQUIPMENT

摘要

A ceramic heater for semiconductor manufacturing and inspecting equipment capable of accurately measuring the temperature of a heated article and uniformly heating an entire silicon wafer by adjusting the heating state of a heating element based on the result of measurement of the temperature, comprising the heating element formed on the surface of or inside a ceramic substrate, characterized in that temperature measuring elements are installed in contact with the ceramic substrate, and the surface roughness of the ceramic substrate coming into contact with the temperature measuring elements is Ra = 5 ñm.