| 摘要 |
A housing for microelectronic devices (see Fig. 1b) requiring an internal vacuum for operation, e.g., an image detector, is formed by tape casting and incorporates leads (38) between interior and exterior of said housing (10) where said leads (38) are disposed on a facing surface of green tape layers( 116, 120 and 118). Adjacent green tape layers (112, 108 and 114) having corresponding apertures (112', 110', 114') therein are stacked on a first closure member (26) to form a resulting cavity and increased electrical isolation or channel sub-structures are achievable by forming adjacent layers whith aperture dimension which vary non-monotonically. After assembly of the device within the cavity, a second closure member (30) is sealed against an open face of the package (10) in a vacuum environment to produce a vacuum sealed device. |
