| 摘要 |
PROBLEM TO BE SOLVED: To stably wash the entire surface of an article to be washed with a washing liquid to which ultrasonic waves with sufficient intensity are applied. SOLUTION: A glass substrate 2 being an object to be washed is fed by feed rollers 4 and the surface of the glass substrate 2 is ultrasonically washed by ultrasonic vibration units 30 arranged in two rows in a lateral direction. A plurality of the ultrasonic vibration units 30 are alternately arranged in two rows so that the ultrasonic vibration units 30 of one row are positioned between the ultrasonic vibration units 30 of the other row. A vibrator 9 and a vibration plate 8 are attached to each of the ultrasonic vibration units 30 in a ratio of 1:1 and, since the vibration plate 8 and the vibrator 9 fixed in a ratio of 1:1 can be detached from each of the ultrasonic vibration units 30 by detaching a bolt, maintenance can be easily performed at a low cost.
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