| 摘要 |
PURPOSE: To improve reproducibility and yields in the separation of a laminating substrate. CONSTITUTION: The laminating substrate 50 having a porous layer inside is retained by substrate retention sections 105 and 106, and fluid is jetted out of a nozzle 120 toward the porous layer of the laminating substrate 50, thus separating the laminating substrate 50 by the porous layer. In the fluid, fluctuation in pressure is restrained within a specific range by a servo driving pump 200.
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