摘要 |
PURPOSE: To provide a thin-film capacitor, capable of facilitating reductions in size, thickness and weight and compensating temperature and to provide a thin film capacitor satisfying the above features and further having a superior Q-value in a high frequency band. CONSTITUTION: The thin-film capacitor comprises two or more first dielectric thin films 4 and 4 and second dielectric thin films 5, having different permittivities between a pair of electrodes 3 and 7. In this capacitor, the absolute value of a capacity temperature coefficient of the first thin film can be set to 50 ppm/°C or less, and a capacity temperature coefficient of the second thin film is negative, and its absolute value can be set to 500 ppm/°C or more.
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