| 摘要 |
PURPOSE: To provide development processing equipment and a development processing method, in which processing efficiency is improved by enabling continuous processing even when a plurality of kinds of developing solutions are used, development processing is equalized and a substrate having high quality can be obtained by reducing the residue of the developing solution. CONSTITUTION: In development processing equipment 24a-24c with spin chucks 41 as one of holding means, on which a substrate G is placed and held, and developing-solution feed mechanism feeding the substrate G held by the spin chucks 41 with a prescribed developing solution, the developing-solution feed mechanism has a plurality of developing-solution discharge nozzles discharging the prescribed developing solution such as nozzles 80a and 80b for forming paddles, one nozzle holding arm 51 holding a plurality of discharge nozzles and lifting-lowering mechanisms 58a and 58b capable of discretely adjusting the height of a plurality of discharge nozzles.
|
