| 发明名称 |
Novel non-crystalline oxides for use in microelectronic, optical, and other applications |
| 摘要 |
The invention relates to non-crystalline oxides of formulas (I) and (II), and methods of forming the same, along with field effect transistors, articles of manufacture, and microelectronic devices comprising the non-crystalline oxides.
|
| 申请公布号 |
US2002024108(A1) |
申请公布日期 |
2002.02.28 |
| 申请号 |
US20010891552 |
申请日期 |
2001.06.25 |
| 申请人 |
LUCOVSKY GERALD;PARSONS GREGORY N. |
发明人 |
LUCOVSKY GERALD;PARSONS GREGORY N. |
| 分类号 |
C01B13/14;C01F17/00;C01G25/02;C01G27/02;C01G35/00;C23C16/40;H01L21/314;H01L21/316;H01L29/51;H01L29/78;H01L33/00;(IPC1-7):H01L29/76 |
主分类号 |
C01B13/14 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
