| 摘要 |
<p>PROBLEM TO BE SOLVED: To easily compare an element distribution map with a spatial extent of an X-ray generating area, and accurately grasp resolution for the element distribution map. SOLUTION: In this face analysis data displaying method in a surface analyzer using an electron beam having means 9, 10 for making spectral diffraction and detecting a characteristic X-ray generated in a surface of a sample 6 irradiated with the electron beam, and a display 17 for displaying, as the element distribution map, a characteristic X-ray counted value provided two- dimensionally by scanning the electron beam on a sample stage 7 two- dimensionally, the spatial extent of the plane-directional generating area of the characteristic X-ray found preliminarily theoretically or by observation is displayed on the element distribution map in the display to be superposed at the same time with a conformed scale. Both of them are accurately compared intuitively, thereby determines the resolution on the element distribution map accurately.</p> |
