| 发明名称 |
A METHOD FOR APERTURING VERTICAL-CAVITY SURFACE-EMITTING LASERS (VSCELS) |
| 摘要 |
A method for aperturing a vertical-cavity surface-emitting laser (VCSEL), for increasing the external quantum efficiency and decreasing the threshold current, involves an etching mixture that is applied to the active region (6) of the VCSEL. The etching mixture is designed in a manner to selectively etch the active region (6) of the VCSEL at a rate substantially faster than the etch rate of at least one of the multiple DBRs (1,2) associated with the VCSEL.
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| 申请公布号 |
WO0217361(A1) |
申请公布日期 |
2002.02.28 |
| 申请号 |
WO2001US26171 |
申请日期 |
2001.08.21 |
| 申请人 |
THE REGENTS OF THE UNIVERSITY OF CALIFORNIA |
发明人 |
COLDREN, LARRY;HALL, ERIC, M.;NAKAGAWA, SHIGERU;ALMUNEAU, GUILHEM |
| 分类号 |
H01S5/024;H01S5/042;H01S5/183;H01S5/30;H01S5/323;H01S5/343;(IPC1-7):H01L21/00;H01S5/00 |
主分类号 |
H01S5/024 |
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