DEVICE SIMULATION APPARATUS, ITS METHOD, AND RECORDING MEDIUM

摘要

PROBLEM TO BE SOLVED: To allow efficient mesh setting with less number of meshes by accurately reflecting a shape calculation result of process simulation on a device simulation structure definition. SOLUTION: Based on the result of process simulation, a position information about such position as of large dopant concentration ratio at a material interface position, PN junction position, and adjoining mesh point is searched with a search start position and its direction specified. The acquired position information is used for dividing a mesh used for device simulation.