Micro electro-mechanical devices, which may be formed using deep etching, and which comprise a vertical micro-mirror (14) coupled to an actuation mechanism for tilting the mirror, preferably about the vertical axis are disclosed. The mirror (14) and actuation mechanism are formed on the same substrate and thus form an integral device or chip.
申请公布号
WO0216997(A1)
申请公布日期
2002.02.28
申请号
WO2001GB03714
申请日期
2001.08.17
申请人
ALCATEL OPTRONICS UK LIMITED;BLAIR, PAUL;PODLECKI, JEAN;MCMEEKIN, SCOTT, GEORGE
发明人
BLAIR, PAUL;PODLECKI, JEAN;MCMEEKIN, SCOTT, GEORGE